Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Using 3D Nanotomography to Visualize Defects in the Fabrication of Superconducting Electronics



Aric W. Sanders, Anna E. Fox, Paul D. Dresselhaus


Superconducting electronics is an established technological field for sensors, quantum computation and quantum-based standards and is emerging as an important low-power alternative to semiconductors. As in any electronics fabrication, the production of complex circuits requires many iterations and stringent quality control. In particular post-fabrication metrology of buried circuit elements to diagnose device failures is of utmost importance to increasing the yield and complexity of superconducting based electronics. To fill this need, we have developed methods for the 3D visualization of superconducting electronic components based on focused ion beam – scanning electron (FIB-SEM) nanotomography
Proceedings Title
Microscopy and Microanyalsis
Conference Dates
August 2-6, 2015
Conference Location
Portland, OR


tomography, nanoscience, superconducting electronics


Sanders, A. , Fox, A. and Dresselhaus, P. (2015), Using 3D Nanotomography to Visualize Defects in the Fabrication of Superconducting Electronics, Microscopy and Microanyalsis, Portland, OR, [online], (Accessed May 29, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created September 23, 2015, Updated November 10, 2018