@conference{212696, author = {Aric Sanders and Anna Fox and Paul Dresselhaus}, title = {Using 3D Nanotomography to Visualize Defects in the Fabrication of Superconducting Electronics}, year = {2015}, number = {21}, month = {2015-09-23}, publisher = {Microscopy and Microanyalsis, Portland, OR}, doi = {https://doi.org/10.1017/S1431927615010004}, language = {en}, }