The Use of an SF5+ Primary Ion Beam for Ultra Shallow Depth Profiling on an Ion Microscope SIMS Instrument
J Greg Gillen, Marlon L. Walker, P E. Thompson, J Bennett
A magnetic sector SIMS instrument has been fitted with a modified hot filament duoplasmatron ion source for generation of SF5+ primary ion beams for SIMS depth profiling applications. The SF5+ primary ion beam has been evaluated by depth profiling of several low energy boron ion implants, boron delta-doped structures and a Ni/Cr metal multilayer depth profiling standard reference material. Using 3.0 keV impact SF5+ bombardment at a 52 degrees impact angle with oxygen flooding gives a trailing edge decay length (l/e) for the boron implants and delta-doped layers of 1.3 nm. Under the same conditions, O2+ bombardment gives a trailing edge decay length (l/e) of 2.3 nm. The use of the SF5+ beam without oxygen flooding gives a substantial increase in decay length that is related to the formation of ripples as determined by AFM. In the case of the Ni/Cr reference material, a significant reduction in sputter-induced topography is observed with SF5+ bombardment.
Journal of Vacuum Science and Technology
polyatomic primary ions, secondary ion mass spectrometry, sulfur hexafluoride, ultra shallow dopants
, Walker, M.
, Thompson, P.
and Bennett, J.
The Use of an SF5+ Primary Ion Beam for Ultra Shallow Depth Profiling on an Ion Microscope SIMS Instrument, Journal of Vacuum Science and Technology
(Accessed November 28, 2023)