Boeuf, J.
and Pitchford, L.
(1995),
Two-dimensional model of a capacitively doubled rf discharge and comparisons with experiments in the GEC reference reactor, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
(Accessed April 26, 2024)
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Two-dimensional model of a capacitively doubled rf discharge and comparisons with experiments in the GEC reference reactor
Published
Author(s)
J P. Boeuf, L C. Pitchford
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
51
Pub Type
Journals
Citation
Created January 1, 1995, Updated February 17, 2017