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Two-dimensional model of a capacitively doubled rf discharge and comparisons with experiments in the GEC reference reactor

Published

Author(s)

J P. Boeuf, L C. Pitchford
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
51

Citation

Boeuf, J. and Pitchford, L. (1995), Two-dimensional model of a capacitively doubled rf discharge and comparisons with experiments in the GEC reference reactor, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics) (Accessed April 19, 2024)
Created January 1, 1995, Updated February 17, 2017