We describe a new high-resolution scanning electron microscope method for measuring crystallographic information in nanoparticles and ultrathin films with dimensions down to 10 nm, through use of an electron backscatter diffraction (EBSD) detector. By tilting the normal of the specimen away from the detector, and detecting transmission EBSD-like scattering from the specimen, we obtained significant improvements in pattern quality and spatial resolution over those factors as observed by conventional EBSD. Examples of patterns from a 40 nm-thick nickel film, GaN nanowires of diameter 30 nm to 50 nm and Fe-Co nanoparticles of diameter 10 nm are shown. Monte Carlo scattering simulations revealed that electrons in the transmission signal exhibit higher average energies and a narrower energy spread than electrons collected in the backscatter geometry.
Citation: Science Magazine
Pub Type: Journals
electron backscatter diffraction, electron diffraction, nanoparticle analysis, scanning electron microscopy, thin film analysis