An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas
Published
Author(s)
M Edamura, Eric C. Benck
Citation
Journal of Vacuum Science and Technology A
Pub Type
Journals
Citation
Edamura, M.
and Benck, E.
(2003),
Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas, Journal of Vacuum Science and Technology A
(Accessed June 4, 2023)