Lightpipe radiation thermometers (LPRTs) have been successfully calibrated at NIST for rapid thermal processing (RTP) applications using a sodium heat-pipe blackbody (Na-HPBB) between 700 C and 900 C with an uncertainty of about 0.3 C (k = 1) traceable to the International Temperature Scale of 1990 (ITS-90). Using appropriate effective emissivity models, LPRTs have been used to determine the wafer temperature in the NIST RTP Test Bed with an uncertainty of 3.5 C. With the aid of a thin-film thermocouple wafer, the LPRT can measure the wafer temperature in the NIST RTP Test Bed with an uncertainty of 2.1 C. In RTP reactors where optical access is available, spot-type radiation thermometers (STRTs) become an attractive technique for temperature measurement. From 700 C to 900 C, STRTs can be calibrated against the Na-HPBB with an uncertainty of about 1.1 C. Cable-less LPRTs (CLRTs) offer a decisive advantage to greater traceability than traditional LPRTs. Application of CLRTs eliminates 2.0 C or more uncertainty from the calibration scheme. The Na-HPBB source and the calibration procedures and uncertainties will be discussed. Calibrating radiation thermometers using the NIST Na-HPBB offers traceability to the ITS-90, decreases temperature measurement uncertainties, and improves temperature accuracy.
Proceedings Title: International Conference on Advanced Thermal Processing of Semiconductors
Conference Dates: September 23-26, 2003
Conference Title: IEEE International Conference on Advanced Thermal Processing of Semiconductors -- RTP
Pub Type: Conferences
blackbody, cable-less lightpipe radiation thermomet, calibration, lightpipe radiation thermometers, rapid thermal processing, sodium heat-pipe blackbody, spot-type radiation thermometers, traceability, uncertainty