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Traceability: The Key to Nanomanufacturing

Published

Author(s)

Ndubuisi George Orji, Ronald G. Dixson, Bryan Barnes, Richard M. Silver

Abstract

Over the last few years key advances have been made in the area of nanomanufacturing and nanofabrication. Several researchers have produced nanostructures using either top-down or bottom-up techniques, while other groups have functionalized such structures into working devices. In all cases, for the devices to be useful, there has to be a way to not only measure their properties but also to know that the results are valid. The measurements have to be traceable. Some of the properties of these nanostructures are determined by size, this increasing the importance of accurate measurements. In this paper, we present work that we have done to introduce traceability to a nanomanufacturing environment, using a concept called reference measurement systems. The paper focuses on length traceability.
Proceedings Title
Proceedings of the Sixth International Conference on Precision, Meso, Micro, and Nano
Engineering,
Conference Dates
December 11-12, 2009
Conference Location
Coimbatore, IN
Conference Title
Sixth International Conference on Precision, Meso, Micro and Nano Engineering

Keywords

Traceability, Nanomanufacturing, reference measurement system, critical dimension Traceability, Nanomanufacturing, reference measurement system, critical dimension Traceability, Nanomanufacturing, reference measurement system, critical dimension Traceability, Nanomanufacturing, reference measurement systemcritical dimension

Citation

Orji, N. , Dixson, R. , Barnes, B. and Silver, R. (2009), Traceability: The Key to Nanomanufacturing, Proceedings of the Sixth International Conference on Precision, Meso, Micro, and Nano Engineering,, Coimbatore, IN, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904180 (Accessed April 16, 2024)
Created December 30, 2009, Updated April 11, 2022