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Time evolution of ion energy distributions and optical emission in pulsed inductively coupled radio frequency plasmas

Published

Author(s)

M Misakian, Eric C. Benck, Ying-ju Wang
Citation
Journal of Applied Physics
Volume
88

Citation

Misakian, M. , Benck, E. and Wang, Y. (2000), Time evolution of ion energy distributions and optical emission in pulsed inductively coupled radio frequency plasmas, Journal of Applied Physics (Accessed May 21, 2024)

Issues

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Created December 31, 1999, Updated October 12, 2021