Misakian, M.
, Benck, E.
and Wang, Y.
(2000),
Time evolution of ion energy distributions and optical emission in pulsed inductively coupled radio frequency plasmas, Journal of Applied Physics
(Accessed May 3, 2024)
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Time evolution of ion energy distributions and optical emission in pulsed inductively coupled radio frequency plasmas
Published
Author(s)
M Misakian, ,
Citation
Journal of Applied Physics
Volume
88
Pub Type
Journals
Citation
Created December 31, 1999, Updated October 12, 2021