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Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors

Published

Author(s)

Christopher M. McKenney, Jason E. Austermann, James A. Beall, Bradley J. Dober, Shannon M. Duff, Jiansong Gao, Gene C. Hilton, Johannes Hubmayr, Dale Li, Joel N. Ullom, Jeffrey L. Van Lanen, Michael R. Vissers

Abstract

We present a superconducting micro-resonator array fabrication method that is scalable and reconfigurable and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We demonstrate this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. Characterization reveals 1.5% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. However, local deviations exhibit a Gaussian distribution in fractional frequency spacing with a standard deviation of 2.7 x 10-3. We exploit this finding to increase the yield of the BLAST-TNG 250 μm production wafer by placing resonators in the array close in both physical and frequency space. This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.
Citation
Review of Scientific Instruments
Volume
90

Keywords

microwave kinetic inductance detector, MKID , micro-resonator , multiplexing, low temperature detector technologies, 1836 polarization-sensitive MKIDs, multiplexing groups, BLAST-TNG, Gaussian distribution, fractional frequency spacing, tiles, photolithography reticles, titanium-nitride superconducting film
Created November 8, 2018, Updated June 29, 2020