@article{256801, author = {Christopher McKenney and Jason Austermann and James Beall and Bradley Dober and Shannon Duff and Jiansong Gao and Gene Hilton and Johannes Hubmayr and Dale Li and Joel Ullom and Jeffrey Van and Michael Vissers}, title = {Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors}, year = {2018}, number = {90}, month = {2018-11-08}, publisher = {Review of Scientific Instruments}, doi = {https://doi.org/10.1063/1.5037301}, language = {en}, }