Gonzalez, E.
, Bonevich, J.
, Stafford, G.
, White, G.
and Josell, D.
(2000),
Thermal Transport Through Thin Films: Mirage Technique Measurements on Aluminum/Titanium Multilayers, Journal of Materials Research, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850345
(Accessed December 8, 2024)
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Thermal Transport Through Thin Films: Mirage Technique Measurements on Aluminum/Titanium Multilayers
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Abstract
Thermal transport properties of multilayer thin films both normal and parallel to the layers were measured. Al/Ti multilayer films 3 m thick, with individual layers systematically varied from 2.5 to 40 nm, were studied on Si substrates. Layers ofAl and Ti were nominally equal in thickness, with actual composition determined for each specimen using energy dispersive spectroscopy. The thermal diffusivity both in the plane of the films (thermal conductivity divided by specific heat per volume) was found to decrease significantly with decreasing bilayer thickness. Pure Ti and Al films as well as Cu films from 0.1 to 5 m thick were also studied. In-plane electrical conductances of the Al/Ti multilayers were also measured.Citation
Journal of Materials Research
Volume
15
Issue
No. 3
Pub Type
Journals
Download Paper
Keywords
aluminum, copper, mirage technique, multilayers, thermal conductivity, thermal diffusion, thin film, titanium
Citation
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Created February 29, 2000, Updated October 12, 2021