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TEST AND CALIBRATION OF DISPLACEMENT MEASURING LASER INTERFEROMETERS

Published

Author(s)

Jack A. Stone Jr.

Abstract

At the National Institute of Standards and Technology (NIST), we have a capability to calibrate and test laser interferometer systems used to measure displacements. Recently our calibration protocol has been modified so as to bring it into accord with a new standard, ANSI/ASME B89.1.8-2011. In addition to quantifying length-proportional errors, our measurements quantify a zero-drift parameter that was not previously measured but can be a significant source of uncertainty for some types of interferometers. The essence of the calibration is a comparison of a customer interferometer to a master interferometer maintained by NIST. The two interferometers are arranged in a back-to-back geometry that is compensated so as to reduce typical sources of drift. The primary advantage of this geometry is its flexibility to measure any customer displacement interferometer.
Proceedings Title
Proceedings, 3rd International Conference on Mechanical Metrology (CIMMEC III)
Conference Dates
October 14-16, 2014
Conference Location
Gramado, Rio Grande do Sul
Conference Title
3rd International Conference on Mechanical Metrology (CIMMEC III)

Keywords

laser interferometry, displacement measurement, dimensional metrology

Citation

Stone, J. (2014), TEST AND CALIBRATION OF DISPLACEMENT MEASURING LASER INTERFEROMETERS, Proceedings, 3rd International Conference on Mechanical Metrology (CIMMEC III), Gramado, Rio Grande do Sul, -1, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916311 (Accessed May 22, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created October 15, 2014, Updated November 16, 2017