TEST AND CALIBRATION OF DISPLACEMENT MEASURING LASER INTERFEROMETERS
Jack A. Stone Jr.
At the National Institute of Standards and Technology (NIST), we have a capability to calibrate and test laser interferometer systems used to measure displacements. Recently our calibration protocol has been modified so as to bring it into accord with a new standard, ANSI/ASME B89.1.8-2011. In addition to quantifying length-proportional errors, our measurements quantify a zero-drift parameter that was not previously measured but can be a significant source of uncertainty for some types of interferometers. The essence of the calibration is a comparison of a customer interferometer to a master interferometer maintained by NIST. The two interferometers are arranged in a back-to-back geometry that is compensated so as to reduce typical sources of drift. The primary advantage of this geometry is its flexibility to measure any customer displacement interferometer.
Proceedings, 3rd International Conference on Mechanical Metrology (CIMMEC III)
October 14-16, 2014
Gramado, Rio Grande do Sul
3rd International Conference on Mechanical Metrology (CIMMEC III)
TEST AND CALIBRATION OF DISPLACEMENT MEASURING LASER INTERFEROMETERS, Proceedings, 3rd International Conference on Mechanical Metrology (CIMMEC III), Gramado, Rio Grande do Sul, -1, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916311
(Accessed November 30, 2023)