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Synchrotron Beamline for Extreme-Ultraviolet Multilayer Mirror Endurance Testing

Published

Author(s)

Charles S. Tarrio, Steven E. Grantham
Citation
Review of Scientific Instruments
Volume
76 No. 5

Keywords

endurance testing, environmental studies, extreme, lifetime testing, multilayer mirrors, ultraviolet lithography

Citation

Tarrio, C. and Grantham, S. (2005), Synchrotron Beamline for Extreme-Ultraviolet Multilayer Mirror Endurance Testing, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=840203 (Accessed May 19, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created May 1, 2005, Updated February 17, 2017