Tarrio, C.
and Grantham, S.
(2005),
Synchrotron Beamline for Extreme-Ultraviolet Multilayer Mirror Endurance Testing, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=840203
(Accessed March 13, 2025)
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Synchrotron Beamline for Extreme-Ultraviolet Multilayer Mirror Endurance Testing
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Author(s)
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Citation
Review of Scientific Instruments
Volume
76 No. 5
Pub Type
Journals
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Keywords
endurance testing, environmental studies, extreme, lifetime testing, multilayer mirrors, ultraviolet lithography
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Created May 1, 2005, Updated February 17, 2017