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Surfactant Effect in the Suppressing of Orange-Peel Coupling in Magnetic Tunnel Junctions by Pre-Oxidation

Author(s)

William F. Egelhoff Jr., Robert D. McMichael, Mark D. Stiles, Cedric J. Powell, John E. Bonevich, M Wormington

Abstract

Pre-oxidation of the bottom electrode prior to deposition of Al2O3 or MgO is very effective as a general approach to suppressing orange-peel coupling in magnetic tunnel junctions. In this paper, we report structural studies on this effect using grazing incidence x-ray reflectometry and transmission electron microscopy. The results suggest that oxygen acts as a surfactant to smooth the surface.
Citation
Physical Review B (Condensed Matter and Materials Physics)

Keywords

magnetic tunnel junction, orange-peel coupling, pre-oxidation

Citation

Egelhoff, W. , McMichael, R. , Stiles, M. , Powell, C. , Bonevich, J. and Wormington, M. (1970), Surfactant Effect in the Suppressing of Orange-Peel Coupling in Magnetic Tunnel Junctions by Pre-Oxidation, Physical Review B (Condensed Matter and Materials Physics) (Accessed April 24, 2024)
Created August 26, 2016, Updated October 8, 2021