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Surface Finish and Sub-Surface Metrology



Theodore V. Vorburger, Ndubuisi George Orji, Li Piin Sung, T Rodriguez


Surface finsih affects the performance of a wide variety of manufactured products ranging from road surfaces and ships to mechanical parts, microelectronics, and optics. Accordingly roughness values can vary over many orders of magnitude. A variety of techniques have been developed for measuring such a wide a range of vertical and lateral roughness features.However, they may generally be classified into three basic types, linear profiling, area profiling (or areal topography), and area averaging. In this paper we focus on profiling and areal topography methods and in particular on two optical mthods, the vertical scanning interferometric microscope and confocal microscope. We emphasize results for sinusoidal profile roughness standards and for metallic particles in coatings.
Proceedings Title
Proceedings of Aerospace Metrology Seminar
Conference Dates
July 3, 2003
Conference Location
V Semetra São Jose dos Campos, 1, BR
Conference Title
Aerospace Metrology Seminar


coating, confocal microscopy, finish, metrology, roughness, scanning interferometry, sinusoidal, Standard Reference Material


Vorburger, T. , Orji, N. , Sung, L. and Rodriguez, T. (2003), Surface Finish and Sub-Surface Metrology, Proceedings of Aerospace Metrology Seminar, V Semetra São Jose dos Campos, 1, BR (Accessed June 19, 2024)


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Created December 31, 2002, Updated October 12, 2021