Suppression of Orange-Peel Coupling in Magnetic Tunnel Junctions by Preoxidation
William F. Egelhoff Jr., Robert McMichael, Cindi L. Dennis, Mark D. Stiles, Alexander J. Shapiro, Brian B. Maranville, Cedric J. Powell
We have found that preoxidation of the bottom Co electrode in magnetic tunnel junctions (MTJs) very effectively suppresses orange-peel coupling. The result is a free layer that is much softer. Work by others has demonstrated that preoxidation is compatible with high-quality MTJ fabrication.
Egelhoff Jr., W.
, McMichael, R.
, Dennis, C.
, Stiles, M.
, Shapiro, A.
, Maranville, B.
and Powell, C.
Suppression of Orange-Peel Coupling in Magnetic Tunnel Junctions by Preoxidation, Applied Physics Letters
(Accessed December 9, 2023)