Superconformal Electrodeposition of Silver from a KAg(CN)2-KCN-KSeCN Electrolyte
B C. Baker, M Freeman, B Melnick, Daniel Wheeler, Daniel Josell, Thomas P. Moffat
Electrodeposition of silver from a KAg(CN)2-KCN electrolyte was investigated. The addition of potassium selenocyanate (KSeCN) results in a hysteretic current-voltage response, specular films and superconformal growth in submicrometer vias. These observations are well described by the recently proposed curvature enhanced accelerator coverage (CEAC) model of film growth.
copper, derivitization, electrodeposition, silver, superconformal fill
, Freeman, M.
, Melnick, B.
, Wheeler, D.
, Josell, D.
and Moffat, T.
Superconformal Electrodeposition of Silver from a KAg(CN)<sub>2</sub>-KCN-KSeCN Electrolyte, Journal of the Electrochemical Society, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853232
(Accessed December 9, 2023)