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Superconformal Electrodeposition of Silver from a KAg(CN)2-KCN-KSeCN Electrolyte

Published

Author(s)

B C. Baker, M Freeman, B Melnick, Daniel Wheeler, Daniel Josell, Thomas P. Moffat

Abstract

Electrodeposition of silver from a KAg(CN)2-KCN electrolyte was investigated. The addition of potassium selenocyanate (KSeCN) results in a hysteretic current-voltage response, specular films and superconformal growth in submicrometer vias. These observations are well described by the recently proposed curvature enhanced accelerator coverage (CEAC) model of film growth.
Citation
Journal of the Electrochemical Society
Volume
150
Issue
No. 2

Keywords

copper, derivitization, electrodeposition, silver, superconformal fill

Citation

Baker, B. , Freeman, M. , Melnick, B. , Wheeler, D. , Josell, D. and Moffat, T. (2003), Superconformal Electrodeposition of Silver from a KAg(CN)<sub>2</sub>-KCN-KSeCN Electrolyte, Journal of the Electrochemical Society, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853232 (Accessed May 30, 2024)

Issues

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Created February 1, 2003, Updated February 17, 2017