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Submicrometer Dimensional Metrology in the Scanning Electron Microscope

Published

Author(s)

Michael T. Postek
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control
Volume
775
Conference Dates
March 4-6, 1987
Conference Location
Santa Clara, CA

Citation

Postek, M. (1987), Submicrometer Dimensional Metrology in the Scanning Electron Microscope, Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control, Santa Clara, CA (Accessed April 18, 2024)
Created December 31, 1987, Updated February 17, 2017