Postek, M.
(1987),
Submicrometer Dimensional Metrology in the Scanning Electron Microscope, Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control, Santa Clara, CA
(Accessed July 27, 2024)
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Submicrometer Dimensional Metrology in the Scanning Electron Microscope
Published
Author(s)
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control
Volume
775
Conference Dates
March 4-6, 1987
Conference Location
Santa Clara, CA
Pub Type
Conferences
Citation
Issues
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Created December 31, 1987, Updated February 17, 2017