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Submicrometer Critical Dimensional Metrology

Published

Author(s)

Robert D. Larrabee, Loren W. Linholm, Michael T. Postek
Citation
Handbook of VLSI Microlithography, Principles, Technology
Publisher Info
Noyes Publications, Park Ridge, IL

Citation

Larrabee, R. , Linholm, L. and Postek, M. (1991), Submicrometer Critical Dimensional Metrology, Noyes Publications, Park Ridge, IL (Accessed July 17, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created November 30, 1991, Updated October 12, 2021