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Submicrometer Critical Dimensional Metrology

Published

Author(s)

Robert D. Larrabee, Loren W. Linholm, Michael T. Postek
Citation
Handbook of VLSI Microlithography, Principles, Technology
Publisher Info
Noyes Publications, Park Ridge, IL

Citation

Larrabee, R. , Linholm, L. and Postek, M. (1991), Submicrometer Critical Dimensional Metrology, Noyes Publications, Park Ridge, IL (Accessed February 22, 2024)
Created November 30, 1991, Updated October 12, 2021