TY  - SER
AU  - Robert Larrabee
AU  - Loren Linholm
AU  - Michael Postek
C2  - Noyes Publications, Park Ridge, IL
DA  - 1991-12-01 00:12:00
LA  - en
PB  - Noyes Publications, Park Ridge, IL
PY  - 1991
TI  - Submicrometer Critical Dimensional Metrology
ER  -