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On the Sub-Nanometer Resolution of Scanning Electron and Scanning Helium Ion Microscopes

Published

Author(s)

Michael T. Postek, Andras Vladar, Bin Ming
Citation
Microscopy Today

Citation

Postek, M. , Vladar, A. and Ming, B. (2009), On the Sub-Nanometer Resolution of Scanning Electron and Scanning Helium Ion Microscopes, Microscopy Today, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901569 (Accessed April 14, 2024)
Created March 1, 2009, Updated February 19, 2017