The Study of the U.S. Measurement System for Micro Nano Technologies
Richard A. Allen, Craig McGray, Michael Gaitan
The National Institute of Standards and Technology (NIST) has launched an ambitious assessment of the nation''s decentralized measurement system, that is far more encompassing than the few studies done over the last several decades. The aim is to determine how this vital infrastructure - the United States Measurement System - can effectively address the rapidly multiplying needs for ever-more exacting and reliable measurement tools and services. NIST has identified Micro Nano Technology as a key focus area for this study, and has partnered with the MEMS Industry Group to assess the most critical needs of this field. This report provides an overview of NIST''s recent work to identify metrology needs that threaten the continued growth of this high-value industry.