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Strategies for Standardizing EDS Measurements



Nicholas Ritchie


Energy dispersive X-ray spectrometers (EDS) are capable of precise and accurate electron beam measurements of composition. However, the optimal strategies for acquiring EDS standards differ from its wavelength dispersive cousin. There is a lot more information in an EDS spectrum that can be used to evaluate its quality. This information can be used to perform inter-comparisons between multiple spectra collected from the same material.
Microscopy and Microanalysis


EDS, Energy Dispersive X-ray Spectrometry, Standardization


Ritchie, N. (2001), Strategies for Standardizing EDS Measurements, Microscopy and Microanalysis, [online], (Accessed April 23, 2024)
Created January 1, 2001, Updated November 29, 2022