Standardless Quantitative Electron-Excited X-Ray Microanalysis by Energy Dispersive Spectrometry: What Is its Proper Role?

Published

November 1, 1998

Author(s)

Dale E. Newbury

Abstract

Electron beam x-ray microanalysis with semiconductor energy dispersive spectrometry (EDS) performed with standards and calculated matrix corrections can yield quantitative results with a distribution such that 95% of analyses fall within + or - 5% relative for major and minor constituents. Standardless methods substitute calculations for the standard intensities, based either on physical models of x-ray generation and propagation (first principles) or on mathematical fits to remotely measured for three different standardless analysis procedures with a suite of microanalysis standards including metal alloys, glasses, minerals, ceramics, and stoichiometric compounds. For the first principles standardless procedure, the error distribution placed 95% of analyses within + or - 50% relative, while for two commercial fitted standards procedures, the error distributions placed 95% of analyses within + or - 25% relative. The implication of these error distributions for the accuracy of analytical results is considered, and recommendations for the use of standardless analysis are given.

Citation

Microscopy and Microanalysis

Volume

4

Pub Type

Journals

Keywords

electron beam x-ray microanalysis, electron probe microanalyzer, energy dispersive spectroscopy

Citation

Newbury, D. (1998), Standardless Quantitative Electron-Excited X-Ray Microanalysis by Energy Dispersive Spectrometry: What Is its Proper Role?, Microscopy and Microanalysis (Accessed November 5, 2025)