Cassard, J.
, Geist, J.
, Vorburger, T.
, Read, D.
, Gaitan, M.
and Seiler, D.
(2013),
Standard Reference Materials(R) User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.260-177
(Accessed July 26, 2024)
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Standard Reference Materials(R) User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition:
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- NIST SP 260-177
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NIST SP 260-177
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NIST Pubs
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Created February 1, 2013, Updated May 20, 2023