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Standard Reference Materials(R) User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition:

Published

Author(s)

Janet M. Cassard, Jon Geist, Theodore V. Vorburger, David T. Read, Michael Gaitan, David G. Seiler
Citation
- NIST SP 260-177
Report Number
NIST SP 260-177

Citation

Cassard, J. , Geist, J. , Vorburger, T. , Read, D. , Gaitan, M. and Seiler, D. (2013), Standard Reference Materials(R) User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.260-177 (Accessed April 14, 2024)
Created February 1, 2013, Updated May 20, 2023