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Standard Reference Materials ::Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems/

Published

Author(s)

Ruth N Varner, Carol F Vezzetti
Citation
- NIST SP 260-117
Report Number
NIST SP 260-117

Citation

Varner, R. and Vezzetti, C. (1992), Standard Reference Materials ::Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems/, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.260-117 (Accessed June 19, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1992, Updated May 20, 2023