Vezzetti, C.
, Varner, R.
and Potzick, J.
(1992),
Standard Reference Materials: Antireflecting-Chromium Linewidth Standard, SRM 475, for Calibration of Optical Microscope Linewidth Measuring Systems, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed June 1, 2024)
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Standard Reference Materials: Antireflecting-Chromium Linewidth Standard, SRM 475, for Calibration of Optical Microscope Linewidth Measuring Systems
Published
Author(s)
C. F. Vezzetti, R. N. Varner,
Citation
Special Publication (NIST SP) -
Volume
260
Issue
117
NIST Pub Series
Pub Type
NIST Pubs
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 1991, Updated October 12, 2021