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Standard Reference Materials: Antireflecting-Chromium Linewidth Standard, SRM 475, for Calibration of Optical Microscope Linewidth Measuring Systems

Published

Author(s)

C. F. Vezzetti, R. N. Varner, James E. Potzick
Citation
Special Publication (NIST SP) -
Volume
260
Issue
117

Citation

Vezzetti, C. , Varner, R. and Potzick, J. (1992), Standard Reference Materials: Antireflecting-Chromium Linewidth Standard, SRM 475, for Calibration of Optical Microscope Linewidth Measuring Systems, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed May 30, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 1991, Updated October 12, 2021