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Stacking Fault Pyramid Formation and Energetics in Silicon-on-Insulator Material Formed by Cycles of Oxygen Implantation and Annealing

Published

Author(s)

J. H. Lee, J Park, D. Venables, S. J. Krause, Peter Roitman
Citation
Applied Physics Letters
Volume
63
Issue
24

Citation

Lee, J. , Park, J. , Venables, D. , Krause, S. and Roitman, P. (1993), Stacking Fault Pyramid Formation and Energetics in Silicon-on-Insulator Material Formed by Cycles of Oxygen Implantation and Annealing, Applied Physics Letters (Accessed February 29, 2024)
Created November 30, 1993, Updated October 12, 2021