Young, M.
(1989),
Spatial Filtering Microscope for Linewidth Measurements, Optics Letters
(Accessed March 16, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Spatial Filtering Microscope for Linewidth Measurements
Published
Author(s)
M. Young
Citation
Optics Letters
Volume
28
Issue
8
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created April 14, 1989, Updated October 12, 2021