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Spatial and Time Characteristics of Low Temperature RF Plasmas for Materials Processing

Published

Author(s)

Sophie Djordjevic, J R. Roberts, James K. Olthoff
Citation
Journal of Magnetohydrodynamics and Plasma Research
Volume
7
Issue
1

Citation

Djordjevic, S. , Roberts, J. and Olthoff, J. (1996), Spatial and Time Characteristics of Low Temperature RF Plasmas for Materials Processing, Journal of Magnetohydrodynamics and Plasma Research, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32421 (Accessed April 23, 2024)
Created December 31, 1995, Updated October 12, 2021