Childs, M.
and Gallagher, A.
(2000),
Small particle growth in silane radio-frequency discharges, Journal of Applied Physics
(Accessed May 18, 2024)
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Small particle growth in silane radio-frequency discharges
Published
Author(s)
M A. Childs, A Gallagher
Citation
Journal of Applied Physics
Volume
87
Pub Type
Journals
Citation
Issues
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Created January 1, 2000, Updated February 17, 2017