Childs, M.
and Gallagher, A.
(2000),
Small particle growth in silane radio-frequency discharges, Journal of Applied Physics
(Accessed October 9, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Small particle growth in silane radio-frequency discharges
Published
Author(s)
M A. Childs, A Gallagher
Citation
Journal of Applied Physics
Volume
87
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2000, Updated February 17, 2017