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Small particle growth in silane radio-frequency discharges

Published

Author(s)

M A. Childs, A Gallagher
Citation
Journal of Applied Physics
Volume
87

Citation

Childs, M. and Gallagher, A. (2000), Small particle growth in silane radio-frequency discharges, Journal of Applied Physics (Accessed December 11, 2023)
Created January 1, 2000, Updated February 17, 2017