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In-situ Temperature Calibration Capability for Dimensional Metrology



Prem K. Rachakonda, Daniel S. Sawyer, Balasubramanian Muralikrishnan, Christopher J. Blackburn, Craig M. Shakarji, Gregory F. Strouse, Steven D. Phillips


The Dimensional Metrology Group (DMG) at the National Institute of Standards and Technology (NIST) has developed a new in-situ temperature calibration system. This paper discusses the system components, an in-situ calibration procedure, the uncertainty sources involved in the calibration process, presents an uncertainty budget, and examines it with a Monte Carlo simulation. This system enables the DMG to perform quicker in-situ temperature calibration, at frequent intervals, with minimal downtime and provides better uncertainties in the dimensional measurements.
NCSL International Measure


calibration, dimensional measurements, temperature measurements


Rachakonda, P. , Sawyer, D. , Muralikrishnan, B. , Blackburn, C. , Shakarji, C. , Strouse, G. and Phillips, S. (2014), In-situ Temperature Calibration Capability for Dimensional Metrology, NCSL International Measure, [online], (Accessed April 20, 2024)
Created December 15, 2014, Updated August 15, 2017