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In-situ Temperature Calibration Capability for Dimensional Metrology

Published

Author(s)

Prem K. Rachakonda, Daniel S. Sawyer, Balasubramanian Muralikrishnan, Christopher J. Blackburn, Craig M. Shakarji, Gregory F. Strouse, Steven D. Phillips

Abstract

The Dimensional Metrology Group (DMG) at the National Institute of Standards and Technology (NIST) has developed a new in-situ temperature calibration system. This paper discusses the system components, an in-situ calibration procedure, the uncertainty sources involved in the calibration process, presents an uncertainty budget, and examines it with a Monte Carlo simulation. This system enables the DMG to perform quicker in-situ temperature calibration, at frequent intervals, with minimal downtime and provides better uncertainties in the dimensional measurements.
Citation
NCSL International Measure
Volume
9
Issue
4

Keywords

calibration, dimensional measurements, temperature measurements
Created December 15, 2014, Updated August 15, 2017