In-situ Temperature Calibration Capability for Dimensional Metrology
Prem K. Rachakonda, Daniel S. Sawyer, Balasubramanian Muralikrishnan, Christopher J. Blackburn, Craig M. Shakarji, Gregory F. Strouse, Steven D. Phillips
The Dimensional Metrology Group (DMG) at the National Institute of Standards and Technology (NIST) has developed a new in-situ temperature calibration system. This paper discusses the system components, an in-situ calibration procedure, the uncertainty sources involved in the calibration process, presents an uncertainty budget, and examines it with a Monte Carlo simulation. This system enables the DMG to perform quicker in-situ temperature calibration, at frequent intervals, with minimal downtime and provides better uncertainties in the dimensional measurements.