Simulation of Electron Spectra for Surface Analysis (SESSA): A Novel Software Tool for Quantitative Auger-Electron Sspectroscopy and X-ray Photoelectron Spectroscopy

Published

June 1, 2005

Author(s)

W Smekal, W S. Werner, Cedric J. Powell

Abstract

A description is given of a new NIST database for quantitative Auger-electron and X-ray photoelectron spectroscopy (AES/XPS): Simulation of Electron Spectra for Surface Analysis (SESSA). This database contains extensive sets of data for the physical quantities relevant to AES and XPS. The internal databases are linked to a user interface via a small expert system that allows a user to automatically retrieve data needed for a specific practical application. SESSA can simulate AES and XPS spectra for a multi-layered thin-film sample for measurement conditions specified by the user. Experimental information needed by SESSA is entered via an interface that matches the settings of AES/XPS instrumentation. The structure of SESSA is described together with information on special features, unique capabilities, and sources of the physical data. Examples are given of practical applications based on tutorial files provided with SESSA that contain command-language files which can be loaded to perform different types of simulations.

Citation

Surface and Interface Analysis

Volume

37

Pub Type

Journals

Keywords

Auger-electron spectroscopy, database, electron spectra, simulation, thin-film samples, X-ray photoelectron spectroscopy

Citation

Smekal, W. , Werner, W. and Powell, C. (2005), Simulation of Electron Spectra for Surface Analysis (SESSA): A Novel Software Tool for Quantitative Auger-Electron Sspectroscopy and X-ray Photoelectron Spectroscopy, Surface and Interface Analysis (Accessed December 14, 2024)