Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Silicon Microelectronics Programs at the National Institute of Standards and Technology: Programs, Activities, and Accomplishments



Joaquin (. Martinez, Stephen Knight, A D. Settle-Raskin


The microelectronics industry is a driving force fueling the U.S. economy, leading to rapid improvements in productivity, and enabling other new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards and Technology, NIST, in fulfilling its mission of strengthening the U.S. economy and improving the quality of life by working with industry to develop and apply technology, measurements, and standards, is devoting considerable effort supporting the semiconductor industry and its infrastructure. This document describes the many projects being conducted at NIST that constitute this effort. The first metrology development activities at NIST, then called the National Bureau of Standards, in support of the semiconductor manufacturing industry began when the industry was in its infancy. As the industry grew and matured the number of projects expanded rapidly. In 1968 a division was formed expressly to address semiconductor metrology issues. Now the breadth of skills required to address semiconductor manufacturing metrology issues encompasses all of the laboratories at NIST. To address the coordinated response to industry needs Congress established the National Semiconductor Metrology Program (NSMP) in 1994. Matrix managed by the Office of Microelectronics Programs, NSMP is currently funded at $12M annually, and is forty projects in six of the seven laboratories at NIST. Most, but not all, of the projects described in this document, are partially funded by NSMP. Additional funding comes from the Advanced Technology Program intramural funding, from the laboratories themselves, from other agencies, and from Cooperative Research and Development Agreements (CRADAs) with industry.
NIST Interagency/Internal Report (NISTIR) - 6522
Report Number


Advanced Technology Program, microelectronics, National Semiconductor Metrology Program, NSMP, semiconductors, silicon


Martinez, J. , Knight, S. and Settle-Raskin, A. (2000), Silicon Microelectronics Programs at the National Institute of Standards and Technology: Programs, Activities, and Accomplishments, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed June 23, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created May 31, 2000, Updated October 12, 2021