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Semiconductor Measurement Techonology: CN-1364 NIST/ VLSI Thin Film Standards: Final Report

Published

Author(s)

Barbara J. Belzer, K Eberhardt, Deane Chandler-Horowitz, James R. Ehrstein, P. Durgapal
Citation
Special Publication (NIST SP) -
Volume
400
Issue
100

Citation

Belzer, B. , Eberhardt, K. , Chandler-Horowitz, D. , Ehrstein, J. and Durgapal, P. (1998), Semiconductor Measurement Techonology: CN-1364 NIST/ VLSI Thin Film Standards: Final Report, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed December 10, 2023)
Created March 31, 1998, Updated October 12, 2021