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Semiconductor Measurement Techonology: CN-1364 NIST/ VLSI Thin Film Standards: Final Report

Published

Author(s)

Barbara J. Belzer, K Eberhardt, Deane Chandler-Horowitz, James R. Ehrstein, P. Durgapal
Citation
Special Publication (NIST SP) -
Volume
400
Issue
100

Citation

Belzer, B. , Eberhardt, K. , Chandler-Horowitz, D. , Ehrstein, J. and Durgapal, P. (1998), Semiconductor Measurement Techonology: CN-1364 NIST/ VLSI Thin Film Standards: Final Report, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed June 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 31, 1998, Updated October 12, 2021