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Search Publications by: Max Low (Fed)

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Accurate Volume Determination for Low Gas Flow Standards

March 17, 2026
Author(s)
Jodie Pope, Christopher Crowley, Max Low, John Wright, Aaron Johnson
The National Institute of Standards and Technology (NIST) has developed the Semiconductor Low Flow Standard (SLowFlowS), a new rate-of-rise (RoR) gas flow standard capable of measuring flows as low as 0.01 standard cm³/min. SLowFlowS incorporates two
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