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Search Publications by: Kirsten Lina (Fed)

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Dielectric Capped Niobium Films for Increased Process Thermal Budget

May 7, 2026
Author(s)
Kirsten Lina, Anna Fox, Paul Dresselhaus
To avoid degradation of circuit performance, fabrication processes for niobium-based superconductive electronics are typically limited to temperatures below 150∘C. In this study, we investigated protective dielectric capping layers that preserve the
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