March 17, 2026
Author(s)
Jodie Pope, Christopher Crowley, Max Low, John Wright, Aaron Johnson
The National Institute of Standards and Technology (NIST) has developed the Semiconductor Low Flow Standard (SLowFlowS), a new rate-of-rise (RoR) gas flow standard capable of measuring flows as low as 0.01 standard cm³/min. SLowFlowS incorporates two