January 22, 2025
      
                  
        
  Author(s)
  Raymond  Simmonds,   Sudhir  Sahu,   Trevyn  Larson,   Florent  Lecocq,   Tongyu  Zhao,   Anthony  McFadden
 
       
            
    
    
        The application of parallel plate capacitors composed of aluminum-contacted, crystalline silicon fins for use in superconducting circuits is explored by evaluating the performance of superconducting lumped element resonators and transmon qubits. High