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Search Publications by: Lakshmi Ravi Narayan (IntlAssoc)

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Nanocalorimetry for plasma metrology relevant to semiconductor fabrication

February 4, 2025
Author(s)
John Diulus, Carles Corbella Roca, Feng Yi, David LaVan, Berc Kalanyan, Mark McLean, Lakshmi Ravi Narayan, William Osborn, James Maslar, Andrei Kolmakov
This letter reports on pilot tests of microfabricated nanocalorimeters as a metrology platform for the rapid (sub-100 ms response time) and sensitive detection of neutral radicals generated by reactive cold plasmas, typical in plasma cleaning applications
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