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Search Publications by: Julia Murphy (Assoc)

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Displaying 1 - 3 of 3

Depth Profiling Chemical Changes in Chemically Amplified Resists for EUV Lithography

July 1, 2026
Author(s)
Daniel Sunday, Peter Dudenas, Priyanka Ketkar, Julia Murphy, Cherno Jaye, Regis Kline, Gurpreet Singh, Eungnak Han, Lauren Doyle, Florian Gstrein
Photoresist patterning for semiconductor manufacturing is encountering new challenges with the move the extreme ultraviolet (EUV) lithography, driven by smaller pitches, thinner resists and fewer photons. Obtaining information about the nanoscale

Self-Assembly of Hierarchical High-h Fluorinated Block Copolymers with an Orthogonal Smectic-within-Lamellae 3 nm Sub-Lattice and Vertical Surface Orientation

April 16, 2024
Author(s)
Bijal Patel, Hongbo Feng, Whitney Loo, Chad R. Snyder, Christopher Eom, Julia Murphy, Daniel Sunday, Paul Nealey, Dean DeLongchamp
Hierarchical structure-within-structure assemblies offer a route toward increasingly complex and multifunctional materials while pushing the limits of block copolymer self-assembly. We present a detailed study of the self-assembly of a series of
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