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Search Publications by: Kwanseob Park (IntlAssoc)

Displaying 1 - 2 of 2

Reflective deep-ultraviolet Fourier ptychographic microscopy for nanoscale imaging

April 29, 2023

Author(s)

Kwanseob Park, Yoon Sung Bae, Sang-Soo Choi, Martin Sohn

Fourier ptychographic microscopy (FPM) that has high space-bandwidth-product and phase imaging capability requires significant resolution enhancement in reflection mode for imaging of nanoscale semiconductor devices. A direct way to nanoscale resolution is

High numerical aperture reflective deep ultraviolet Fourier ptychographic microscopy for nanofeature imaging

September 8, 2022

Author(s)

Kwanseob Park, Yoon Sung Bae, Sang-Soo Choi, Martin Sohn

Pushing the resolution limit to the nanoscale is a critical challenge for applying the reflective Fourier ptychographic microscopy (FPM) to metrologies for characterization of nanoscale features. Optical image-based characterization of reflective nanoscale