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Search Publications by: Kwanseob Park (IntlAssoc)

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Reflective deep-ultraviolet Fourier ptychographic microscopy for nanoscale imaging

April 29, 2023
Author(s)
Kwanseob Park, Yoon Sung Bae, Sang-Soo Choi, Martin Sohn
Fourier ptychographic microscopy (FPM) that has high space-bandwidth-product and phase imaging capability requires significant resolution enhancement in reflection mode for imaging of nanoscale semiconductor devices. A direct way to nanoscale resolution is
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