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Bright focused ion beam sources based on laser-cooled atoms

March 24, 2016
Author(s)
Jabez J. McClelland, Adam V. Steele, Brenton J. Knuffman, Kevin A. Twedt, Andrew D. Schwarzkopf, Truman M. Wilson
Nanoscale focused ion beams (FIBs) represent one of the most useful tools in nanotechnology, enabling nanofabrication via milling and gas-assisted deposition, microscopy and microanalysis, and selective, spatially resolved doping of materials. Recently, a