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Displaying 1 - 7 of 7

Chemical Warfare Agent Detection Using MEMS Microsensor Arrays

August 1, 2005
Author(s)
Douglas C. Meier, C J. Taylor, Richard E. Cavicchi, Edward White V, M W. Ellzy, K B. Sumpter, Stephen Semancik
Chemical sensors capable of accurate detection of trace quantities of chemical warfare (CW) agents would provide a potent tool for perimeter security, treaty verification, battlefield threat detection, and the protection of civilians in public places

Chemical Warfare Agent Detection Using MEMS-Compatible Microsensor Arrays

August 1, 2005
Author(s)
Douglas C. Meier, C J. Taylor, Richard E. Cavicchi, Edward White, M W. Ellzy, K B. Sumpter, Stephen Semancik
Microsensors have been fabricated consisting of TiO2 and SnO2 sensing films prepared by chemical vapor deposition (CVD) on MEMS- (micro-electromechanical systems) compatible array platforms. Response measurements from these devices to the CW agents GA
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