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Mechanical Properties of Si 02 and Si 3 N 4 Coatings: A BAM/NIST Cooperative Project

September 24, 1998

Author(s)

U Beck, Douglas T. Smith, G Reiners, S J. Dapkunas

Mechanical properties, i.e., hardness and elastic modulus, of amorphous Si 02 and Si 3N^4^ PE-CVD coatings have been studied for two coating thicknesses (0.1 υm and 1.0 υm) and two substrate materials (fused silica, i.e., Herasil, and borosilicate glass, i