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Search Publications by: Christopher W. Meyer (Fed)

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Displaying 51 - 75 of 107

Determination of SPRT Realization Uncertainties Between Points

September 6, 2006
Author(s)
Christopher W. Meyer, Dean C. Ripple
Calibrated Standard Platinum Resistance Thermometers (SPRTs) are used to realize the International Temperature Scale of 1990 (ITS-90) from 13.8033 K to 1234.93 K. The SPRTs are calibrated at a series of fixed points, each assigned a temperature on the ITS

Temperature Measurements of Microhotplates Using Fluorescence Thermometry

March 1, 2006
Author(s)
Christopher W. Meyer, Douglas C. Meier, Christopher B. Montgomery, Stephen Semancik
A fluorescence microscope has been constructed for measuring surface temperatures of microhotplate platforms. The microscope measures temperature-dependent fluorescence lifetimes of a film of the phosphor Mg4(F)GeO6:Mn which is deposited on the

CCT Key Comparison No 1 (CCT-K1): Realisations of the ITS-90, 0.65 K to 24.5561 K, Using Rhodium-Iron Resistance Thermometers

June 1, 2004
Author(s)
R L. Rusby, Christopher W. Meyer, Weston L. Tew, D I. Head, K D. Hill, O Tamura, P A. de Groot, B Fellmuth, A Storm, A Peruzzi, J Engert, D N. Astrov, Y Dedikov, G A. Kytin
At its meeting in 1996 the CCT initiated five Key Comparisons to test the equivalence of realisations of the ITS-90 between National Measurement Institutes. CCT-K1 covers the temperature range from 0.65 K to 24.5561 K, in which the ITS-90 is defined by

Calibration of Radiation Thermometers in Rapid Thermal Processing Tools Using Si Wafers with Thin Film Thermocouples

October 1, 2003
Author(s)
Kenneth G. Kreider, William A. Kimes, Christopher W. Meyer, Dean C. Ripple, Benjamin K. Tsai, D H. Chen, D P. DeWitt
Rapid thermal processing (RTP) tools are currently monitored and controlled with lightpipe radiation thermometers (LPRTs) which have been calibrated with thermocouple instrumented wafers. We have developed a thin-film thermocouple wafer that enables more

A Four-Zone Furnace for Realization of Silver and Gold Freezing Points

September 1, 2003
Author(s)
Dean C. Ripple, K Garrity, Christopher W. Meyer
Recently, the Thermocouple Calibration Laboratory at the National Institute of Standards and Technology has used sodium heat-pipe furnaces for the realization of ITS-90 freezing points of aluminum, silver, and gold. When using a fixed-point cell mounted in

Recent Results of NIST Realizations of the ITS-90 Below 84 K

January 1, 2003
Author(s)
Weston L. Tew, Christopher W. Meyer
The results at NIST of realizations and comparisons of the ITS-90 below 84 K are presented. The 3He and 4He vapor pressure scales (0.65 K to 5.0 K), and the interpolating constant volume gas thermometer (ICVGT) scale (5.0 K to 24.556 K) as realized from

The NIST Low Temperature ITS-90 Realization and Calibration Facilities

October 1, 2002
Author(s)
Christopher W. Meyer, Weston L. Tew
Two facilities have been constructed at NIST for realizing and maintaining the ITS-90 below 84 K. The first facility is an integrated low temperature realization system that realizes the ITS-90 below 84 K in its entirety and which we refer to as the Low

Wafer Emissivity Effects on Light Pipe Radiometry in RTP Tools

May 1, 2002
Author(s)
Kenneth G. Kreider, David W. Allen, D H. Chen, D P. DeWitt, Christopher W. Meyer, Benjamin K. Tsai
We investigated the effect of different wafer emissivities and the effect of low emissivity films on RTP wafer temperature measurements using light pipe radiation thermometers (LPRTs). These tests were performed in the NIST RTP test bed. We used a NIST

Effects of Wafer Emissivity on Light-Pipe Rediometry in RTP Tools

September 1, 2001
Author(s)
Kenneth G. Kreider, David W. Allen, D H. Chen, D P. DeWitt, Christopher W. Meyer, Benjamin K. Tsai
We investigated the effect of different wafer emissivities and the effect of low emissivity films on rapid thermal processing (RTP) wafer temperature measurements using lightpipe radiation thermometers (LPRTs). These tests were performed in the NIST RTP