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Search Publications by: Theodore D. Doiron (Assoc)

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Displaying 26 - 37 of 37

Dimensional Metrology of Millimeter- and Sub-millimeter-scale Components

October 1, 2000
Author(s)
Theodore V. Vorburger, Jun-Feng Song, Joseph Fu, M Tundermann, Thomas Brian Renegar, Theodore D. Doiron, N G. Orji
Decreasing sizes and tolerances of engineering components bring a demand for decreasing uncertainty in the dimensional measurements of these parts. Hence there is increasing need for measuring machines capable of performing dimensional and geometrical

Video Based Metrology

June 1, 2000
Author(s)
Theodore D. Doiron, John R. Stoup, Tsai Hong Hong, Marilyn N. Abrams
With the rapid growth of video-based measurement and inspection systems, we would like to determine the extent to which industry needs calibration artifacts and standardized methods for video metrology. We hope to open a dialog among users for discussing

Effects of Defocus and Algorithm on Optical Step Height Calibration

July 1, 1999
Author(s)
Theodore D. Doiron, Theodore V. Vorburger, P Sullivan
Defocus effects on step height measurements by interferometric microscopy are estimated using different algorithms to calculate the step height. The interferometric microscope is a Mirau-type with a 20x objective and a numerical aperture (NA) of 0.4. Even

Two-Dimensional Calibration Artifact and Measurement Methodology

June 1, 1999
Author(s)
Richard M. Silver, Theodore D. Doiron, William B. Penzes, S Fox, Edward A. Kornegay, S Rathjen, M Takac, D Owen
In this paper, we describe our design and the manufacturing of a two-dimensional grid artifact of chrome on quartz on a 6 inch by 6 inch by .250 glass blank. The design has been agreed upon by a number of SEMI participants working on a two-dimensional

Case Against Optical Gauge Block Metrology

September 1, 1998
Author(s)
Theodore D. Doiron, Dennis S. Everett, Bryon S. Faust, Eric S. Stanfield, John R. Stoup
The current definition of length of a gage block is a very clever attempt to evade the systematic errors associated with the wringing layer thickness and optical phase corrections. In practice, there are very large systematic operator and surface effects

Uncertainty and Dimensional Calibrations

November 1, 1997
Author(s)
Theodore D. Doiron, John R. Stoup
The calculation of uncertainty for a measurement is an effort to set reasonable bounds for the measurement result according to standardized rules. Since every measurement produces only an estimate of the answer, the primary requisite of an uncertainty

Glass and Dimensional Metrology

April 1, 1997
Author(s)
Theodore D. Doiron
Ordinary glass, even good optical quality glass, will shrink up to 20 micrometers/meter over the first few years after its manufacture. Gages made of glass are therefore not suitable as high accuracy artifacts unless they are calibrated often. Better

The Gage Block Handbook

June 1, 1995
Author(s)
Theodore D. Doiron, John S. Beers
Gage blocks are the primary method used by industry to standardize the measurement of dimension. This work discusses every aspect of gage block calibration, including definitions, characteristics of gage blocks, calibration by interferometry and mechanical

A High Accuracy Micrometer for Diameter Measurements of Cylindrical Standards

January 1, 1994
Author(s)
John R. Stoup, Theodore D. Doiron
NIST has developed a new instrument to measure cylindrical standards including thread wires and plain plug gages. The instrument uses a laser interferometer system which is coupled with an air bearing linear motion slide and precise contact geometry to