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Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 {?}/sec,

Published

Author(s)

A H. Mahan, A Gallagher
Citation
Applied Physics Letters
Volume
78

Citation

Mahan, A. and Gallagher, A. (2001), Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 {?}/sec, <!-- Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up , Applied Physics Letters (Accessed May 24, 2024)

Issues

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Created January 1, 2001, Updated February 17, 2017