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Rubidium Vapor Cell with Integrated Nonmetallic Multilayer Reflectors



M A. Perez, U Nguyen, A Shkel, Svenja A. Knappe, Elizabeth A. Donley, John E. Kitching


This paper reports on a method for improving the optical efficiency of micromachined reflectors for use in rubidium vapor cells. A hybrid bulk micromachining / multilayer thin film technique is used to form the integrated reflectors, which can redirect laser light through the vapor cell and back toward the plane of the source with reduced optical power loss. This process is shown to improve the optical efficiency of a micromachined reflector cell by as much as eight times over etched silicon reflectors alone. The D 1 absorption line in such a miniature alkali 87 Rb vapor cell with integrated thin film reflectors is demonstrated using two thin film micromirror reflections.
Proceedings Title
Proc. 2008 IEEE MEMS Conf.


atomic clocks, MEMS, vapor cell


Perez, M. , Nguyen, U. , Shkel, A. , Knappe, S. , Donley, E. and Kitching, J. (2008), Rubidium Vapor Cell with Integrated Nonmetallic Multilayer Reflectors, Proc. 2008 IEEE MEMS Conf., [online], (Accessed April 16, 2024)
Created January 13, 2008, Updated February 17, 2017